2022 NEW design Factory directly Model: IBE500 3 Axis Ion Beam Etching System/Equipment for optical industry

Products Description

至臻光电

APPLICATION

√ Surface Modification/Polishing

√ Ion Beam Etching

√ Ion Beam Thinning

Technical Parameter

S/No.	Model.	Product Name	Overall Size	Max. loading capacity of table	Max. Workpiece Size	Surface Quality		Max. Removal Rate
S/No.	Model.	Product Name	LWH	Max. loading capacity of table	Max. Workpiece Size	RMS	PV	Max. Removal Rate
1	IBF300-3Axis	Ion Beam Featuring System	350020003500mm	100mm	Φ300mm	≤1nm	≤15nm	10nm/s
2	IBF500-3Axis		420028003500mm	150mm	Φ500mm
3	IBF750-3Axis		450030003500mm	200mm	Φ750mm
4	IBF1000-3Axis		600030003500mm	800mm	Φ1000mm
5	IBF1500-3Axis		800034004000mm	2000mm	Φ1500mm
6	IBF2000-3Axis		10000060006000mm	3000mm	Φ2000mm
7	IBF4000-3Axis		13700080007500mm	10000mm	Φ4000mm
8	IBE500-3Axis	Ion Beam Etching System	420028003500mm	150mm	Φ500mm
9	IBE1000-3Axis		600030003500mm	800mm	Φ1000mm
10	IBE1500-3Axis		800034004000mm	2000mm	Φ1500mm

Remark
1:Material : SUS304/316;
2:Can customize based on your requirements;

Operation Parameter

S/No.	Model.	Product Name	Travel			Max. Speed of travel
S/No.	Model.	Product Name	X	Y	Z	X	Y	Z
1	IBF300-3Axis	Ion Beam Featuring System/ Equipment	350mm	350mm	200mm	100mm/s	100mm/s	100mm/s
2	IBF500-3Axis		550mm	550mm	200mm	200mm/s	200mm/s	100mm/s
3	IBF750-3Axis		800mm	800mm	200mm	200mm/s	200mm/s	100mm/s
4	IBF1000-3Axis		1050mm	1050mm	200mm	200mm/s	200mm/s	100mm/s
5	IBF1500-3Axis		1550mm	1550mm	200mm	200mm/s	200mm/s	100mm/s
6	IBF2000-3Axis		2050mm	2050mm	200mm	200mm/s	200mm/s	100mm/s
7	IBF4000-3Axis		4050mm	4050mm	200mm	200mm/s	200mm/s	100mm/s
8	IBE500-3Axis	Ion Beam Etching System/ Equipment	550mm	550mm	200mm	200mm/s	200mm/s	100mm/s
9	IBE1000-3Axis		1050mm	1050mm	200mm	200mm/s	200mm/s	100mm/s
10	IBE1500-3Axis		1550mm	1550mm	200mm	200mm/s	200mm/s	100mm/s

S/No.	Model.	Product Name	Positioning Accuracy			Repetitive Positioning Accuracy
S/No.	Model.	Product Name	X	Y	Z	X	Y	Z
1	IBF300-3Axis	Ion Beam Featuring System/ Equipment	≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
2	IBF500-3Axis		≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
3	IBF750-3Axis		≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
4	IBF1000-3Axis		≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
5	IBF1500-3Axis		≤40μm	≤40μm	≤40μm	≤20μm	≤20μm	≤20μm
6	IBF2000-3Axis		≤40μm	≤40μm	≤40μm	≤20μm	≤20μm	≤20μm
7	IBF4000-3Axis		≤40μm	≤40μm	≤40μm	≤20μm	≤20μm	≤20μm
8	IBE500-3Axis	Ion Beam Etching System/ Equipment	≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
9	IBE1000-3Axis		≤20μm	≤20μm	≤20μm	≤10μm	≤10μm	≤10μm
10	IBE1500-3Axis		≤40μm	≤40μm	≤40μm	≤20μm	≤20μm	≤20μm

至臻光电

beam

20&mu

200mm

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